Trimethylsilane
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Product Description
Product
Trimethylsilane
CAS
993-07-7
Formula
C3H10Si
Synonym
Typical Product Specifications
Molecular weight
74.20
InChI
1S/C3H10Si/c1-4(2)3/h4H,1-3H3
InChIKey
PQDJYEQOELDLCP-UHFFFAOYSA-N
Notes
Trimethylsilane uses and applications include: Reducing agent; forms trimethylsilylalkanes from olefins; plasma treatment of surfaces; for PECVD of protective coatings and low K dielectronic and barrier layers in damascene metallization
Suggested storage of Trimethylsilane: Handle only in sealed purged systems; store cylinders above 55 C away from direct sunlight, precipitation, mech. damage
Class
Functions
Trimethylsilane
Product Description
Product
Trimethylsilane
CAS
993-07-7
Formula
C3H10Si
Synonym
Typical Product Specifications
Molecular weight
74.20
InChI
1S/C3H10Si/c1-4(2)3/h4H,1-3H3
InChIKey
PQDJYEQOELDLCP-UHFFFAOYSA-N
Notes
Trimethylsilane uses and applications include: Reducing agent; forms trimethylsilylalkanes from olefins; plasma treatment of surfaces; for PECVD of protective coatings and low K dielectronic and barrier layers in damascene metallization
Suggested storage of Trimethylsilane: Handle only in sealed purged systems; store cylinders above 55 C away from direct sunlight, precipitation, mech. damage
Class
Functions
